visuel bandeau labo inSTI

Thin-layers and microfabrication laboratory

Thin-layers and microfabrication laboratory

The laboratory is specialised in the deposit and analysis of thin layers (epi or not) of metals and oxides on wafers up to 4 inches (PVD, PECVD).

Équipement(s): 
  • Aligner for Karl Suss MA56 masks
  • Laminar flow bench with spin coater, ultrasound bath and heating plates

Contact

Head of laboratory

Nicolas Stucki
HEPIA
Rue de la Prairie 4
1202 Genève
Switzerland