Laboratory of Thin Films and Microfabrication
- UV photolithography with maskless aligner (256-level grayscale available)
- Thin film deposition by RF sputtering on substrates up to 4'', with heating capability up to 850 °C in an oxidizing atmosphere, off-axis or confocal configurations
- Thin film deposition by low and high-temperature thermal evaporation
Laboratory of Nanotechnology and Photoluminescence
- Topographical characterization of surfaces and thin films with nanometric lateral and vertical resolutions (AFM and IOM)
- Development of measurement instruments adapted to the micro/nano world
- Characterization of surface hardness and elastic modulus by micro and nanoindentation, both static and dynamic (depth profiling)
Laboratory of Applied Optics at the Micro- and Nano-scale
- Multi-spectral optical tomography with fluorescence (OPT) with a field of view from 2 to 25 mm² per projection and spatial resolution <10 μm
- Multi-color bright-field microscopy of histopathology samples
- Digital holography microscopy with cellular resolution
- Development of distributed fiber optic temperature sensors
- Development of laser sources and optical spectroscopy methods (fluorescence, Raman)
- Development of low-cost optical imaging and detection systems