Materials, Optics and Nanotechnology

MENU Materials, Optics and Nanotechnology

Laboratory of Thin Films and Microfabrication 

  • UV photolithography with maskless aligner (256-level grayscale available)
  • Thin film deposition by RF sputtering on substrates up to 4'', with heating capability up to 850 °C in an oxidizing atmosphere, off-axis or confocal configurations
  • Thin film deposition by low and high-temperature thermal evaporation

Laboratory of Nanotechnology and Photoluminescence

  • Topographical characterization of surfaces and thin films with nanometric lateral and vertical resolutions (AFM and IOM)
  • Development of measurement instruments adapted to the micro/nano world
  • Characterization of surface hardness and elastic modulus by micro and nanoindentation, both static and dynamic (depth profiling)

Laboratory of Applied Optics at the Micro- and Nano-scale

  • Multi-spectral optical tomography with fluorescence (OPT) with a field of view from 2 to 25 mm² per projection and spatial resolution <10 μm
  • Multi-color bright-field microscopy of histopathology samples
  • Digital holography microscopy with cellular resolution
  • Development of distributed fiber optic temperature sensors
  • Development of laser sources and optical spectroscopy methods (fluorescence, Raman)
  • Development of low-cost optical imaging and detection systems